The dynamically steady-state surface relief of polycrystalline copper sputtered by high-dose (10 18 -10 19 ion/cm 2 ) 30 keV Ar + ion bombardment at room temperature has been traced as a function of the ion incidence angle h i in a wide (0-80Β°) angular range. For each incidence angle the distributio
β¦ LIBER β¦
Experimental investigation of the angular dependence of Be self-sputtering
β Scribed by E. Hechtl; J. Roth; W. Eckstein; C.H. Wu
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 231 KB
- Volume
- 220-222
- Category
- Article
- ISSN
- 0022-3115
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