✦ LIBER ✦
Experimental investigation of shape changes in electrochemical micromachining through photoresist masks
✍ Scribed by E. Rosset; D. Landolt
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 363 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0141-6359
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