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Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers

✍ Scribed by Sedky, S.; Witvrouw, A.; Bender, H.; Baert, K.

Book ID: 114538578
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 251 KB
Volume: 48
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.902741

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