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Experimental determination of parameters of a plasma jet

✍ Scribed by A. S. Sakhiev; G. P. Stel'makh; E. I. Ryabtsev; V. A. Kosarenkov; V. P. Shumchuk; N. A. Chesnokov

Publisher
Springer US
Year
1976
Tongue
English
Weight
392 KB
Volume
31
Category
Article
ISSN
1573-871X

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## Abstract The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen wit