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Experimental and theoretical study of the cracking behavior of sol-gel-derived SiO2film on InP substrate

✍ Scribed by F. García-Santibañez; A. Barragán-Vidal; A. Gutiérrez; M. Mendoza; J.A. Ascencio

Publisher
Springer
Year
2000
Tongue
English
Weight
201 KB
Volume
70
Category
Article
ISSN
1432-0630

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Nylon-6 substrates were coated with SiO2 thin films by the sol-gel method and their water permeability coefficient was evaluated. Methyltriethoxysilane (MTES) and tetraethoxysilane (TEOS) were used as starting materials. The addition of MTES to TEOS has enabled the formation of crack-free thin films