Study of surface passivation of InP
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Mircea Faur; Maria Faur; Phillip Jenkins; Manju Goradia; Sheila Bailey; Douglas
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Article
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1990
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John Wiley and Sons
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English
β 677 KB
## Abstract The effects of various surface preparation procedures, including chemical treatments in HF, HNO~3~, __o__βH~3~PO~4~ and H~2~SO~4~ solutions and anodic oxidation, on the passivating properties of InP have been investigated in order to optimize the fabrication procedures of __n__^+^__p__