Experimental and theoretical studies of the 2DEG mobility in modulation-doped GaAs/Al1−xGaxAs heterostructures

Theoretical and experimental studies of

Theoretical and experimental studies of the broadening of dilute delta-doped Si spikes in GaAs during SIMS depth profiling

✍ R. Badheka; M. Wadsworth; D. G. Armour; J. A. van den Berg; J. B. Clegg 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 905 KB

## Abstract Delta‐doped structures represent a powerful class of test structures to investigate the experimental and fundamental factors limiting the depth resolution obtainable in SIMS sputter depth profiling. In this work, theoretical studies of the effects on the broadening of an Si delta spike