Experimental and theoretical characterization of an inductively coupled plasma source

✍ Scribed by Scheubert, P.; Fantz, U.; Awakowicz, P.; Paulin, H.

• Book ID: 120043590
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 443 KB
• Volume: 90
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1375009