Experimental and modeling study on increasing accuracy of strain measurement by ion beam analysis in SiGe strained layer thin films

✍ Scribed by Martin, Michael S.; Wijesundera, Dharshana; Thompson, Phillip E.; Wang, Xuemei; Chu, Wei-Kan; Shao, Lin

• Book ID: 122311639
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 815 KB
• Volume: 332
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2014.02.102