✦ LIBER ✦
Experiences with an rf sputtering system of non-grounded double electrode configuration : C. R. D. Priestland, Vacuum19, No. 11 (1969), p. 487
- Publisher
- Elsevier Science
- Year
- 1970
- Tongue
- English
- Weight
- 103 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0026-2714
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