✦ LIBER ✦
Experience gathered with the application of the special-type ZRM-12 scanning electron microscope in the semiconductor industry : S. A. Inozemtsev, V. G. Popov and V. N. Yudayev. Jena Review2/1979, 61
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 128 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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