Excited-state charge-transfer interactions in electron-beam resists based on styrene copolymers

✍ Scribed by Richard G. Jones; Philip C. Miller Tate; David R. Brambley

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 445 KB
• Volume: 34
• Category: Article
• ISSN: 0032-3861
• DOI: 10.1016/0032-3861(93)90340-g