On-line determination of sputtered depth
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Hartenstein, Matthew L.; Marcus, R. Kenneth
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Article
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1999
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John Wiley and Sons
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English
โ 178 KB
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A new method of sputtered depth determination was evaluated for glow discharge (GD) analysis of solid samples. Although sputter analysis methods like GD may characterize samples in terms of both composition and spatial (depth) distribution of those components, quantitative analysis may suffer signif