✦ LIBER ✦

Excimer Lasers Support Industrial Micromachining Diversity

✍ Scribed by Gerd Spiecker

Book ID: 112137953
Publisher: Wiley (John Wiley & Sons)
Year: 2007
Weight: 135 KB
Volume: 4
Category: Article
ISSN: 1613-7728
DOI: 10.1002/latj.200790141

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## Abstract The characteristics and abilities of excimer lasers for micromachining of fused silica and crystal quartz are reviewed and their applications for making high‐precision and high‐quality microstructures are studied. In addition to the direct ablation technique, two special techniques: las