✦ LIBER ✦

Excimer laser projection patterning with and without resists

✍ Scribed by D. J. Ehrlich

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Positive excimer laser resists prepared

✍ Hisashi Sugiyama; Keisuke Ebata; Akiko Mizushima; Kazuo Nate 📂 Article 📅 1989 🏛 Society for Plastic Engineers 🌐 English ⚖ 410 KB

Maskless excimer laser induced projectio

✍ R. Heydel; R. Matz; W. Göpel 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 820 KB

Submicron-resolution ablation with a KrF

✍ F. Weisbuch; S. Lazare; F.N. Goodall; D. Débarre 📂 Article 📅 1999 🏛 Springer 🌐 English ⚖ 287 KB

Excimer-laser ablation and micro-pattern

✍ J. Heitz; J.D. Pedarnig; D. Bäuerle; G. Petzow 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 416 KB

Patterning of PLZT and PSZT thin films b

✍ P.W. Leech; A.S. Holland; S. Sriram; M. Bhaskaran 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 636 KB

Early applications of laser direct patte

📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 120 KB