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Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection

✍ Scribed by K. Zimmer; R. Böhme; A. Braun; B. Rauschenbach; F. Bigl


Publisher
Springer
Year
2002
Tongue
English
Weight
255 KB
Volume
74
Category
Article
ISSN
1432-0630

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