Excimer laser-induced damage in bilayer carbide/polyimide systems

✍ Scribed by G. Danev; E. Spassova; K. Petkov; R. I. Tomov; K. Popova; P. A. Atanasov; J. Ihlemann

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 629 KB
• Volume: 9
• Category: Article
• ISSN: 1616-301X
• DOI: 10.1002/1099-0712(199911/12)9:6<227::aid-amo386>3.0.co;2-o

✦ Synopsis

The effect of XeCl (308 nm, 20 and 75 ns) excimer laser ablation of 30-40 nm thick carbide layers (TiC, Cr 3 C 2 , B 4 C) deposited on 2000 nm polyimide in the laser fluence range 10-1300 mJ cm -2 has been investigated. The surface modification in the ablated spot areas has been observed. At fluences of 100-250 mJ cm -2 , complete removal of the carbide layers was achieved without damage to the bottom polyimide layer. Ablation at fluences above 250 mJ cm -2 caused interface damage and a different polyimide behaviour under RIE in oxygen.