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Excimer laser induced conductivity on silver salt filled polyimide films

✍ Scribed by B Hopp; Z Szilassi; K Révész; Z Kocsis; I Mudra


Book ID
108418430
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
385 KB
Volume
109-110
Category
Article
ISSN
0169-4332

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Conducting layers on KrF excimer-laser-irradiated polyimide film surfaces were investigated by XPS, SEM and Fourier transform infrared (FTIR)-Raman spectroscopy. Analysis of polyimide residue after laser irradiation provided valuable insight into the nature of the formation of conducting layers. The