✦ LIBER ✦
Excimer laser cleaning of Si(100) surfaces at 193 and 248 nm studied by LEED, AES and XPS spectroscopies
✍ Scribed by R. Larciprete; E. Borsella
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 517 KB
- Volume
- 76
- Category
- Article
- ISSN
- 0368-2048
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