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Exceptions to the microstructure zone model revealed by the reactive d.c. magnetron sputter deposition of δ-TiNx thin films

✍ Scribed by V. Poulek; C. Quaeyhaegens; G. Knuyt; L. Stals; V. Fagard


Book ID
107930270
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
381 KB
Volume
60
Category
Article
ISSN
0257-8972

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