Effect of rf bias (ion current density)
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Su B. Jin; Yoon S. Choi; Youn J. Kim; In S. Choi; Jeon G. Han
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Article
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2010
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Elsevier Science
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English
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a-SiO 2 Hardness rf bias Ion current density Low temperature Silicon oxide thin films are transparent protective coatings with anti-scratch, chemical resistant, barrier properties that have recently emerged as one of the prime coating technologies for depositing a range of functional optical coatin