✦ LIBER ✦
Exact determination of the real substrate temperature and film thickness in vacuum epitaxial growth systems by visible laser interferometry
✍ Scribed by H Sitter; GJ Glanner; MA Herman
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 874 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0042-207X
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