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Evolution of the structure and hydrogen bonding configuration in annealed hydrogenated a-Si/a-Ge multilayers and layers

✍ Scribed by Frigeri, C.; Serényi, M.; Csik, A.; Szekrényes, Zs.; Kamarás, K.; Nasi, L.; Khánh, N.Q.

Book ID
121904429
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
607 KB
Volume
269
Category
Article
ISSN
0169-4332

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Hydrogen release in annealed hydrogenate
Hydrogen release in annealed hydrogenated a-Si/a-Ge multilayers
✍ C. Frigeri; M. Serényi; N. Q. Khánh; A. Csik; Z. Erdélyi; L. Nasi; D. L. Beke; H 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 148 KB

## Abstract A combined study of hydrogenated sputtered single a‐Si and a‐Ge layers and a‐Si/a‐Ge multilayers (MLs) has been carried out in order to establish the reasons of H release and associated structural degradation of the MLs when they are submitted to annealing. ERDA analysis of the single l