Evolution of the Co–N/Ti/Si System in Magnetron Sputtering of Co onto a Heated Ti/Si(100) Substrate

✍ Scribed by A. G. Vasiliev; A. L. Vasiliev; R. A. Zakharov; A. A. Orlikovsky; I. A. Horin; M. Eindou

• Book ID: 111609428
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 167 KB
• Volume: 33
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1023/b:rumi.0000011093.63543.a8