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Evolution of particle size distribution in a pulsed SiH4 plasma process

✍ Scribed by Dong-Joo Kim; Kyo-Seon Kim

Publisher
American Institute of Chemical Engineers
Year
2008
Tongue
English
Weight
586 KB
Volume
54
Category
Article
ISSN
0001-1541

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## Abstract Flocculation dynamics accounting for both particle coagulation and aggregate breakage was simulated mathematically by using modified sectional modeling techniques. The methodological improvement included the use of a continuous‐size density function, instead of a characteristic size for