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Evolution in Structural and Optical Properties of Stannic Oxide Xerogel upon Heat Treatment

โœ Scribed by Nae-Lih Wu; Li-Fu Wu; Irene A. Rusakova; Alejandro Hamed; Alexader P. Litvinchuk


Book ID
110827674
Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
521 KB
Volume
82
Category
Article
ISSN
0002-7820

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## Abstract Rf magnetron sputtering technique was employed for preparation of tantalum oxide films on quartz and crystalline silicon (111) substrates held at room temperature by sputtering of tantalum in an oxygen partial pressure of 1x10^โ€4^ mbar. The films were annealed in air for an hour in the