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Evidence of two-phase structure in amorphous silicon oxides produced by N2O+SiH4 glow-discharge decomposition

✍ Scribed by G. Fortunato; D. Della Sala


Book ID
115985955
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
159 KB
Volume
97-98
Category
Article
ISSN
0022-3093

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