Evidence of an implantation process in carbon deposition on Si(100) at high substrate temperature by laser ablation

✍ Scribed by J.A. Martín-Gago; F. Comin; S. Ferrer

• Book ID: 117216697
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 595 KB
• Volume: 369
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(96)00746-7