Evidence and Understanding of ALD<tex>$hbox HfO_2hbox --hbox Al_2hbox O_3$</tex>Laminate MIM Capacitors Outperforming Sandwich Counterparts

✍ Scribed by Ding, S.-J.; Hu, H.; Zhu, C.; Li, M.F.; Kim, S.J.; Cho, B.J.; Chan, D.S.H.; Yu, M.B.; Du, A.Y.; Chin, A.

• Book ID: 127162368
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 378 KB
• Volume: 25
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/led.2004.835791