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Evaporated a-Si films with low ESR defect density by hydrogenation under NH3 ambient

✍ Scribed by L. Kubler; J.J. Koulmann; R. Haug; A. Jaéglé


Book ID
103372707
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
255 KB
Volume
48
Category
Article
ISSN
0038-1098

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