Evaluation of surface and subsurface cracks in nanoscale-machined single-crystal silicon by scanning force microscope and scanning laser microscope

✍ Scribed by Tsunetaka Sumomogi; Masayoshi Nakamura; Toshiro Endo; Takayuki Goto; Satoshi Kaji

• Book ID: 114340776
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 246 KB
• Volume: 48
• Category: Article
• ISSN: 1044-5803
• DOI: 10.1016/s1044-5803(02)00198-5