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Evaluation of structural and mechanical properties of aluminum oxide thin films deposited by a sol–gel process: Comparison of microwave to conventional anneal

✍ Scribed by A.R. Phani; S. Santucci

Book ID: 116669695
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 413 KB
Volume: 352
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2006.06.013

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