✦ LIBER ✦
Evaluation of sputtering rate change in the silicon transient region under medium energy O2+ sputtering
✍ Scribed by Akio Takano; Hisataka Takenaka
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 411 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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