✦ LIBER ✦
Evaluation of selective tungsten plugs on TiN, W and AlSi by analytical and electrical measurements
✍ Scribed by S.E. Schulz; B. Hintze; W. Grünewald; O. Fiedler; T. Gessner
- Book ID
- 103618668
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 858 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0169-4332
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