Evaluation of residual deformations generated by a pulsed ion implanter using interferometric phase measurement

✍ Scribed by G.H. Kaufmann; S.P. Brühl; G.E. Galizzi; J.N. Feugeas

• Book ID: 103312615
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 876 KB
• Volume: 27
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/0030-3992(95)93960-y