✦ LIBER ✦
Evaluation of micromechanical properties of buckled SiOxNy-loaded membranes by combining the Twyman–Green interferometry with nanoindentation and point-wise deflection technique
✍ Scribed by Michal Józwik; Christophe Gorecki; Andrei Sabac; Patrick Delobelle; Małgorzata Kujawińska
- Book ID
- 108401976
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 617 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0143-8166
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