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Evaluation of microfracture toughness and microcracking with notch tip radius of Si film structure for microactuator in hard disk drives

✍ Scribed by S.-H. Lee; J. S. Kim; J. W. Evans; D. Son; Y. E. Pak; J. U. Jeon; D. Kwon


Publisher
Springer-Verlag
Year
2001
Tongue
English
Weight
250 KB
Volume
7
Category
Article
ISSN
0946-7076

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