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Evaluation of Lead Zirconate–Titanate Ceramic Target for Sputter Deposition of Films for Use in Ferroelectric Capacitors

✍ Scribed by Jeffrey Scott Cross; Mineharu Tsukada; Yasuyuki Goto; Nobuo Kamehara; Satsuki Nagayama


Book ID
111328327
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
344 KB
Volume
2
Category
Article
ISSN
1546-542X

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