Evaluation of ion projection using heavy ions suitable for resistless patterning of thin magnetic films

✍ Scribed by W.H. Bruenger; C. Dzionk; R. Berger; H. Grimm; A. Dietzel; F. Letzkus; R. Springer

• Book ID: 114155471
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 238 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00565-8