Evaluation of dry etch damage in nano-structures by direct transmission electron microscopic examination

✍ Scribed by R. Cheung; A. Birnie; J.N. Chapman; S. Thoms; C.D.W. Wilkinson

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 274 KB
• Volume: 11
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(90)90177-u