Evaluation of compositional intermixing at interfaces in Si(Ge)/Si1−xGexheteroepitaxial structures grown by molecular beam epitaxy with combined sources of Si and GeH4

✍ Scribed by L. K. Orlov; N. L. Ivina; A. V. Potapov

• Book ID: 110125011
• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 89 KB
• Volume: 34
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/1.1317564