Evaluation of compositional depth profiles in mixed-phase (amorphous+crystalline) silicon films from real time spectroscopic ellipsometry

✍ Scribed by A.S. Ferlauto; G.M. Ferreira; R.J. Koval; J.M. Pearce; C.R. Wronski; R.W. Collins; M.M. Al-Jassim; K.M. Jones

• Book ID: 113936687
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 146 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2003.11.228