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Evaluation of commercial metal-oxide based NO2 sensors

✍ Scribed by Hsu, Lun-Chen; Ativanichayaphong, Thermpon; Cao, Hung; Sin, Jeongsik; Graff, Mason; Stephanou, Harry E.; Chiao, J.-C.


Book ID
111983204
Publisher
Emerald Group Publishing Limited
Year
2007
Tongue
English
Weight
754 KB
Volume
27
Category
Article
ISSN
0260-2288

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## Abstract In this work we present the fabrication and characterization of low power SnO~2~ gas sensors based on Porous Silicon micro‐hotplates for the detection of toxic gases, like CO and NO. The response of the SnO~2~ gas sensors was measured for various gas concentrations (100‐500 ppm). Analys