✦ LIBER ✦
Evaluation of automated spectroscopic ellipsometry for in-line process control — ESPRIT Semiconductor Equipment Assessment (SEA) Project `IMPROVE'
✍ Scribed by C Pickering; J Russell; V Nayar; J Imschweiler; H Wille; S Harrington; C Wiggins; J.-L Stehlé; J.-P Piel; J Bruchez
- Book ID
- 114086353
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 573 KB
- Volume
- 313-314
- Category
- Article
- ISSN
- 0040-6090
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