✦ LIBER ✦
Evaluation of an advanced submicron X-ray stepper (XRS 200): Pattern transfer and alignment accuracy
✍ Scribed by K. Simon; F. Gabeli; W. Rohrmoser; S. Seedorf; H.-U. Scheunemann; H.L. Huber
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 421 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.