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Evaluation of a fourier transform method for accurate critical dimension measurements

✍ Scribed by M.E. Guillaume; N. Noailly; M. Pichot; J.L. Buevoz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A fast Gaussian method for Fourier trans

✍ Hope, L.L. 📂 Article 📅 1975 🏛 IEEE 🌐 English ⚖ 273 KB

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✍ P. C. Chakravarti; M. Barrientos 📂 Article 📅 1994 🏛 Springer Netherlands 🌐 English ⚖ 418 KB

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✍ W.F Eberlein 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 247 KB

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✍ J. K. Mackenzie 📂 Article 📅 1967 🏛 Society for Industrial and Applied Mathematics 🌐 English ⚖ 336 KB