Evaluation for Anomalous Stress-Induced Leakage Current of Gate Films Using Array Test Pattern

✍ Scribed by Kumagai, Y.; Teramoto, A.; Inatsuka, T.; Kuroda, R.; Suwa, T.; Sugawa, S.; Ohmi, T.

• Book ID: 114620632
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 334 KB
• Volume: 58
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2011.2161991