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EUV resist simulation with rigorous mask computation and simplified resist models

✍ Scribed by A. Jouve; D. Fuard; V. Farys

Book ID: 104050506
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 143 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.077

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