✦ LIBER ✦
Etching Silicon with HF-HNO 3 -H 2 SO 4 /H 2 O Mixtures - Unprecedented Formation of Trifluorosilane, Hexafluorodisiloxane, and Si-F Surface Groups
✍ Scribed by Lippold, Marcus; Böhme, Uwe; Gondek, Christoph; Kronstein, Martin; Patzig-Klein, Sebastian; Weser, Martin; Kroke, Edwin
- Book ID
- 118758174
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 667 KB
- Volume
- 2012
- Category
- Article
- ISSN
- 1434-1948
No coin nor oath required. For personal study only.