✦ LIBER ✦
Etching of10Boron with SF6-based Electron Cyclotron Resonance Plasmas for Pillar-Structured Thermal Neutron Detectors
✍ Scribed by L. F. Voss; C. E. Reinhardt; R. T. Graff; A. M. Conway; R. J. Nikolić; N. Deo; C. L. Cheung
- Book ID
- 107455760
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 361 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0361-5235
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